Microfabricated Motor-Compressor for Fuel Cell Applications

摘要

Technology has been developed for micro electrical and mechanical systems (MEMS) micro motor-compressor and blower devices occupying less than a cubic centimeter. Made with semiconductor manufacturing techniques; these devices are intended for applications such as pressurization for fuel cells in the 50- 150 watt range and the aspiration of analytical instruments. It consists of an integral silicon micro electric motor and centrifugal compressor approximately 4 mm in diameter and 2 mm thick. Technologies demonstrated include microrotors spinning at 15M rpm, high power den sty thin film electrostatic motors, and microfabricated centrifugal compressors. A complete motor-compressor device has been operated on the bench at low power only. Progress on the component technologies suggest that such a device could deliver 1-2 watts of fluid power in a 4 mm rotor size.