Fabrication and Characterization of Nano-Optic Devices.

摘要

In this program, we have developed the ability to microfabricate optical devices with feature sizes significantly smaller than the wavelength of light, and use these to control light within very small geometries. Although structures with similar lateral dimensions have been made by electron beam lithography for over 20 years now, it has only recently become possible to transfer such patterns into semiconductors with a high enough quality to produce photonic nanostructures' in materials systems with a large refractive index contrast. Through our improved processing capabilities, it is now possible to efficiently localize light and thereby miniaturize the lateral sizes of optical devices.