Focused-Ion Beam (FIB) Nano-Fabrication and Characterization Facility

摘要

This has been a most successful% project. The FIB has been purchased, installed and is now the most productive instrument in the Microscopy Center at Lehigh. Substantial research has been accomplished by the group of the principal investigator, but much research has been done by many other groups as well. Much of the work has involved the preparation of samples for examination in the transmission electron microscope (TEM) and scanning electron microscope (SEM), but - as anticipated in the proposal - several experiments have already used the FIB for novel methods of nanofabrication of devices.