AASERT-ISNP. Micro-Electro-Mechanical Systems (MEMS) Research for Intelligent Sensor Network and Smart Structures.

摘要

Under the AASERT-ISAS project, the Center for Engineering Design sought to refine processing techniques associated with cylindrical microfabrication and use these processes to assemble a functional microelectrode fabricated on a cylindrical substrate. Processes such as small feature patterning, passivation layer application, and connection methods were investigated.