Acquisition of a Nanometer-Scale Auger Electron Spectroscopy Analytical Microprobe

摘要

We have acquired an Auger Electron Spectroscopy Microprobe Analysis System for elemental and bonding analysis of electronic materials, equipped with specimen stage, ion beam depth analyzer, and ultrahigh vacuum (UHV) preparation chamber interfaced to an existing UHV scanning electron microscope. The specific equipment purchased is: JEOL USA, Inc. Auger Electron Spectroscopy Depth Profiling Hardware and Software for the JAMP-7800 deg F. Its acquisition enhances a number of DoD-funded programs and student training that involve development of high power and high frequency electronic materials with superior performance, especially improving the state-of-the-art and availability of radiation-tolerant semiconductor electronics for applications in the space environment investigators.