Fast and Accurate Boundary Variation Method for Multi-Layered Diffraction Optics

摘要

A boundary variation method for the forward modeling of multi- layered diffraction optics is presented. The approach enables for fast and high- order accurate modeling of infinite periodic and finite aperiodic transmission optics, consisting of an arbitrary number of materials and interfaces of general shape, subject to plane wave illumination or, by solving a sequence of problems, illumination by beams The key elements of the algorithm are discussed as are details of an efficient implementation. Numerous comparisons with exact solutions and highly accurate direct solutions con firms the accuracy, versatility, and efficiency of the proposed method.