Self-oscillating Ultrasonic Micro-motor and It's Application

摘要

We have developed an ultrasonic micro-motor, which is expected to be used in a broad range of fields. The ultrasonic micro-motor, which can be driven by a single signal and change the rotational direction of a rotor easily by only selecting the electrode to apply drive signal, can easily construct a self-oscillating circuit and simplify the drive circuit. We have also simplified the motor structure which is easy to miniaturize and mass-produce. We applied the ultrasonic micro-motor to some functions in watches and clocks. Furthermore we have tried precise positioning control with the ultrasonic micro- motor, and consequently it's potential for the ultra-precision positioning has been revealed.