Micromachined Precision Inertial Instruments

摘要

This program focuses on developing inertial-grade micromachined accelerometers and gyroscopes and their associated electronics and packaging for use in a variety of military and commercial applications. During the project timeline in-plane, out-of-plane and monolithic 3-axis accelerometers have been developed with their interface electronics. Analysis, simulation, fabrication, and testing techniques for these accelerometer systems have been developed.