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Uncertainty in Manufacture and Assembly of Multiple-Joint Solder Self- Assembled Microelectromechanical Systems (MEMS).

机译:多关节焊料自组装微机电系统(mEms)制造和组装的不确定性。

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Surface-micromachined microelectromechanical systems (MEMS) are two dimensional in their 'as fabricated' form. Surface-micromachined MEMS can be assembled after fabrication to realize systems with a more three-dimensional form and function. One reliable m ...

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