MEMS Based Absorption Micro-Spectrometer for Toxic Vapor Detection and Identification

摘要

A two year effort has begun to design, fabricate and test a MEMS based infrared absorption interferometer spectrometer for use in the 2-13.5 m spectral region for the detection and identification of toxic vapors. Sensitivity projections and enhancements are outlined and compared to requirements for several applications. The initial design approach using compliant mechanisms and unique combination of existing and developmental components is outlined and tradeoff between resolution, sensitivity and breadth of applications is discussed.