Future Aerospace Science and Technology Center for Space Cryoelectronics at Florida International University

摘要

1. Deposition of good quality 123 and BTO films on LaA103 by laser ablation. 2. Surface roughness caused stiction issues have moved us to sputtered films at FIU - successful. 3. Good release and patterning using sputtered SiN and Si films for MEMs fabrication at Hanscom AFB have been demonstrated with adequate yields. Poor climate (humidity in the clean room) has destroyed the superconductivity of the samples making more runs necessary. Switches however DO function - problem is with the superconductor film. - Release problems have come back to haunt this effort. ... 4. We demonstrated with the use of resonators incorporating switches that the insertion loss of such a switch can be less than 0.007 dB. 5. Several frequency agile resonators using switches were demonstrated along with down-state tuning of a switch.