Superconducting MEM Switches for Microwave Power Applications.

摘要

In the fourth year of the project the work on optimization of fabrication process for a capacitively shunted RF micro- electromechanical superconducting switch was continued. Simulations and measurements show that the filter response is not critically distorted by the presence of the MEM switches. When the filter is not active, the signal is attenuated by a value of < 0.9 dB at 3 GHz. Yield of fabricated devices was improved to be greater than 40%. Work on study of the effect of temperature on the Au Young' s elastic modulus was performed.