Wafer Level Micropackaging for RF MEMS Switches

摘要

Wafer-level micro-encapsulation is an innovative, low-cost, wafer- level packaging method for encapsulating RF MEMS switches. This zero-level packaging technique has demonstrated 0.04 dB package insertion loss at 35 GHz. This article overviews the processes, measurements, and testing methods used for determining the integrity and performance of individual encapsulated RF MEMS packages.