Micromachined RF Switch With High Mechanical Reliability

摘要

For this project, MESA (MEMS Early-Stage Analysis) was implemented to develop ,'tri state multi-contact' switch. The switch was designed and processed to enhance mechanical and RF performance compare to the conventional RF MEMS switches. The switch was successfully fabricated using Metal MUMPs (Thick Metal deposition) process. It demonstrated 107 cycles of switching and 0.5 dB insertion loss. This RF MEMS can be further developed for future advanced RF communications systems for the space based and superior air applications.