Capacitive MEMS Microphone Optimized Research

摘要

This report describes the initial design study of a project to develop a MEMS microphone optimized for photoacoustic signal detection. A MEMS based design has been developed with a predicted sensitivity 48 times that of current state of the art microphones and a 27 dB lower sensitivity to mechanical vibration. This new design is a modification of a commercial MEMS microphone currently in production. Arrangements have been made to produce a commercial prototype of this microphone for photoacoustic applications using a modification of the process that has been proven successful in the manufacture of millions of commercial telecom microphones.