Hybrid Actuator for 3-Axis Control

摘要

This report documents the development of a hybrid device for simultaneous 3-axis vibration reduction. This device was found to deliver approximately 30 to 45 dB downstream vibration reduction of both single and multiple tones. It is robust, reproducible, and sufficiently well-behaved that it can achieve this high performance level using just a base acceleration minimization. A key to its high performance is the ultra-low distortion provided by the highly linear single-crystal piezoelectric actuator. This report summarizes the design procedure, development, and results for what may be the first fully successful small-size 3-axis hybrid actuator.