HTSC Microbolometer for Passive MMW Imaging Applications; Conference paper

摘要

High temperature superconductor (HTSC) microbolometers are highly sensitive thermal detectors that can be miniaturized for affordable passive millimeter-wave (MMW) imaging. When coupled to a micro-antenna and built into an imaging system, they are most promising for pilotage in fog, clouds, and smoke. A completely dry etch process is described for fabricating resistive- edge microbolometers based on YBa2Cu3O7 (YBCO).