Nonlinear Oscillations of Microscale Piezoelectric Resonators and Resonator Arrays

摘要

Oscillations of clamped-clamped and free-free micro- electromechanical resonators and resonator arrays have been studied in this effort. Piezoelectric actuation is used to excite these resonator structures on the input side and piezoelectric sensing is carried out on the output side. Composite structural models have been developed for these filters, and analyses has been carried out to explain experimental observations of nonlinear phenomena as well as to guide the design of these filters are presented. Semi- analytical design tools for micro-electromechanical resonators and micro- electromechanical resonator arrays have been developed. The phenomenon of intrinsic localized modes in resonator arrays has also been studied, and it is shown that these modes can be explained as forced nonlinear vibration modes. The research findings can open the doors to new resonator array designs.