Photonic Crystals in Silicon via Growth and Preferential Oxidation

摘要

Si, SiGe, and Ge nanomembrances offer a much more powerful paradigm for the development of silicon optoelectronics overall, not just PCs. Hence explore SiNM fabrication process as a more versatele apporach to Ge-based PCs. Develop membrance processingl release/transfer this is a major topic, as there are many parameters that can be modified. Develop membrane stacking procedures again, these depend on the release and transfer protocols, optimize ways to do this. Characterize Bragg mirrors and simple Si-based PC work with SiNMs. Develop processing ideas for 3D Si-based PCs. Develop contract technology. Develop a theoretical understanding of the relationship of complex index of refraction and charge in SiNMs.