Piezomems Devices for Advanced Communications and Phased Array Radar

摘要

In this article, we report on the successful demonstration of lead zirconate titanate (PZT) thin film based MEMS devices for use in radio frequency (RF) systems. Individual series switches and single pole multi-throw switching elements operating at or below 10 V have been developed capable of operating over a wide temperature range. The switch technology also provides an enabling technology for low voltage, mechanical logic. Along with switches and phase shifters, PZT based MEMS resonators show promise in the sub-GHz regime with demonstrated insertion loss values near 3.5 dB.