Characteristics of Surface-Normal Fano Filters on Flexible Plastic Substrates

摘要

We report here the angular and polarization dependent transmission characteristics of surface-normal optical filters based on Fano resonances on patterned single crystalline silicon nanomembranes (SiNM), which were fabricated and transferred onto transparent PET plastic substrates using a disruptive SiNM wet transfer process. The measured surface-normal and angle- dependent filter transmission results agree well with the design and simulation based on 3D finite-difference time-domain technique.