Large Actuator Count MEMS Deformable Mirror Development

摘要

Large-actuator-count deformable mirrors (DM) are essential for high- contrast imaging systems NASA is developing for exoplanet detection. These same mirrors can be used to correct aberrations from atmospheric turbulence for free- space communications and imaging applications. This presentation presents recent results on improving performance of DMs and scaling the DM technology to nearly 500 actuators. Performance improvements include the development of dielectric coatings and the demonstration of DMs with snap-in-failure mitigation devices. The presentation further describes work towards extending the DM technology to thousands of actuators.