Procedure to Determine and Correct for Transmission Line Resistances for Direct Current On-Wafer Measurements

摘要

In this technical note, a procedure is presented that can be used to determine the intrinsic line resistances between a two-port power supply and a device under test (DUT). In order to make an accurate on wafer direct current (DC) measurement, it is necessary to determine the voltages at the terminals of the DUT. As the amount of current that semiconductor devices are capable of handling increases, the voltage drop due to line losses will also increase. A handful of measurements can be used to determine the line resistance, and by using a simple algorithm, the voltage across the DUT can be calculated.