Large-Scale Arrays of Single Layer Graphene Resonators

摘要

We use chemical vapor deposition-grown graphene to produce large arrays of suspended, single layer graphene membranes with lithographically defined shape, and aligned to microfabricated structures on a substrate. We measure the mechanical resonance frequency and tune it with both electrostatic gate voltage and temperature. Resonator quality factors improve with temperature, from 20-300 at 300 K to 9000 at 10 K. These measurements show that it is possible to produce large arrays of graphene resonators that maintain graphene's excellent electrical and mechanical properties.