Voltage-Tunable High-Q Acoustic Resonators for RF Applications

摘要

The electrostrictive property of thin-film strontium titanate (STO) and barium strontium titanate (BST) is manifest as a voltage-induced piezoelectricity. During the four years of this award the PI proposed and successfully demonstrated a new type of voltage-activated bulk-acoustic-wave (VBAW) resonator to exploit this effect. These new type of devices could form the building block for a new class of high-performance reconfigurable RF filters. The final report outlines the basic concept and progress achieved during the program towards the goal of implementing useful reconfigurable filter structures.