Application of the Moment Method in the Slip and Transition Regime for Microfluidic Flows.

摘要

Gas flows in microfluidic devices suffer from non-equilibrium effects. To capture various non-equilibrium phenomena in the slip and early transition regime, the hydrodynamic system is extended from the Navier- Stokes- Fourier equations to the regularised 26 moment equations via Grad s moment method based on kinetic theory. It is shown in this lecture that the extended hydrodynamic equations can be effectively applied to micro-electro-mechanical- systems analytically and numerically. Well known non-equilibrium phenomenon, such as Knudsen layers and the Knudsen minimum, are used to validate the extended hydrodynamic model. It is demonstrated that the moment method can be used to predict gas flows in micro-electro-mechanical-systems.