A MICROMINATURE AMPLIFIER WITH THIN-FLIM PASSIVE PARTS

摘要

A microminiature 30-Mc IF amplifier stage was fabricated from vacuumdeposited thin-film passive components and two inserted parts. The vacuumdeposited parts, thin films of nickel-chromium, aluminum, and silicon monoxide, were laid down for use as resistors, conductors and dielectrics, respectively. In the deposition processes, dimensionally accurate masks are essential and they were achieved by the use of a spark erosion technique. A specially designed mask-and-substrate holder accurately indexed the masks relative to the substrates.