FIFTH QUARTERLY REPORT PRODUCTION ENGINEERING MEASURE PRODUCTION DEVELOPMENT OF A SILICON PLANAR EPITAXIAL TRANSISTOR

摘要

The production development phases of this contract were completed during the fourth quarter so this report contains only the efforts expended in the Reliability Engineering area. The power step-stress, operating life, and environmental testing of the Al-Al-Au metallization process are covered and the results compared with the older metallization processes. An acceleration factor was determined between step-stress levels and the level for which the 001%/1000 hours objective was established.