Techniques and Apparatus for Evaporating Compound Semiconductors

摘要

An apparatus for producing thin films of intermetallic semiconductors is described. It has been used for producing films of indium antimonide and indium arsenide as well as mixed crystal films of these two compounds. The principal improvements over older equipments are independently shielded evaporators and a substrate heater suspended in quartz tubes so that the substrate can be heated by radiation from above. (Author)