Study of Thin Film Compounds Formed from Simultaneously Evaporated Constituents

摘要

The preparation of lead titanate thin films by simultaneous evaporation of lead and titanium oxides has been continued, with emphasis on complete oxidation of titanium while in the vapor phase, prior to film deposition. Test capacitors with lead titanate dielectric have been prepared with a specific capacitance of 1.8 micro F/2 sq. cm. and a dissipation factor of 3.7 percent. The preparation of lead titanate capacitors on silicon substrates is in progress. (Author)