Production Engineering Measure. Item 3: Silicon Planar Epitaxial Transistor

摘要

The report presents a detailed narrative of the results of investigations conducted from May 1962 to February 1964 in each of the following task: improved KPR resolution, collector etching, contact evaporation and alloying, boron diffusion phosphorus diffusion collector contact to the Header, interconnections, reliability measurement, process specifications, quality control manual, and production quality test. Data, sketches, and photographs relative to the work are included with the discussion of work accomplished relative to each task.