Inductive Plasma Heating Using a Multiturn Coil

摘要

Earlier inductive plasma studies have resulted in very low energy efficiency systems. The purpose of this study was to investigate the effects of increased coil inductance and increased coil 'filling' on system efficiency. Although the new coil inductance accounted for only slightly over 50% of the total circuit inductance, over 27% of the stored energy was coupled into the plasma under proper conditions. Capacitance was 10 micro fd, voltages of 6, 7 and k kv were employed, and argon over the pressure range 80-500 microns, was used as the test gas. (Author)