HIGH RESOLUTION RAPIDLY PROGRAMMABLE MASKING FOR FUNCTIONAL ELECTRONIC BLOCKS

摘要

Major accomplishments of the report period are discussed. Efforts directed toward design and fabrication of a fully automated Phase II Microscribe Maskmaker were (1) completion of the design study and the final design of an x-y platform and drive mechanism, (2) completion of the design study and the final design of a multiple image optical system, (3) completion of the illumination system design and mock-up, and (4) fabrication of the major portion of the control unit assembly.