TR-1297 VACUUM-DEPOSITED CADMIUM SULFIDE THIN FILMS

摘要

Cadmium sulfide was vacuum-deposited onto glass substrates at approximately 2 x 10~6 torr using electron beam heating. Initial resistivities were in the range 0.1 to 1 ohm-cm. After heating in vacuum at 360° to 370°C for 1/2 hr, the resistivities increased to the range 0.3 to 3 x 10 5 ohm-cm.nTo correlate resistivity with crystal structure, the cadmium sulfide films were studied by means of X-ray and electron diffraction, and spectrophotometry, it was found that these cadmium sulfide films were hexagonal and highly oriented with the c-axis perpendicular to the plane of the substrate. Grain size perpendicular to the c-axis was much less than 100 A after deposition onto room-temperature substrates, and increased to 100 to 200 in diameter after heat treatment,nTo determine the type of contact the commonly deposited metals make to cadmium sulfide, a mask changer was employed to allow the deposition of layerized arrays of metal-cadmium sulfide-metal in a single pump down. Aluminum, indium, silver, and gold were thereby deposited in several different electrode combinations. Combinations having aluminum as one (or both) of the electrodes exhibited rectifying characteristics;all other combinations exhibited ohmic characteristics.