Piezoresistive Strain Gage Accelerometers

摘要

Semiconductor strain gages have been successfully integrated by diffusion into silicon spring members, resulting in microelectronic transducers. This concept of using force as an input parameter to an integrated circuit has been shown to be feasible for many military applications including accelerometers, pressure transducers, and vibration pickups. The principal topics covered in this report are (1) characterization of integrated semiconductor strain gage materials, (2) theory of integrated transducer design for a military environment, (3) integrated circuit force sensor fabrication techniques, and (4) design, fabrication, and evaluation of a typical accelerometer. (Author)