A Comparator Calibration Method

摘要

A method is described for calibrating precision comparators by using grid plates which have been calibrated by means of a triangulation method based exclusively on distance measurements. The method used for calibrating the grid plate provides measurements of the x, y coordinates for selected grid intersections to an accuracy better than plus or minus 1 micron. Using calibrated grid plates, the comparator may be calibrated to determine instrument constants such as: (1) Overall scalers of the measuring screws. (2) Non-orthogonality between the x and y movements. (3) Translation and rotation between grid and comparator coordinate systems. The results of a number of calibrations are shown. (Author)