Instrument for Contactless Measuring of Parameters of Thin Semiconductive Films

摘要

A device for rapid measurement of parameters of semiconductor films is described. The apparatus removes the need for direct contact of electrodes upon test specimens and permits the study of parameter distribution along the film, as well as the investigation of kinetic photoelectric processes. A circuit diagram of the device is given. Special elements in its network include a 6NZP lamp and an ENO-1 oscillograph. The authors describe in detail the functions of the more important items in the network, paying particular attention to the use of electrodes on two types of measurement condensers. A discussion of the variation of network current with different semiconductor film sizes and types is given. (Author)