Testing of Microelectronics. The Electron Microprobe and the Scanning Electron Microscope

摘要

An electron probe is a finely focused beam of electrons accelerated through a potential of 5 to 40kv. When this beam strikes a substance, it induces several phenomena whose effects can yield information about the irradiated area. This report is concerned with two types of electron probe instruments, the Electron Microprobe Analyzer and the Scanning Electron Microscope. The principles of operation, capabilities, and design considerations for each instrument are discussed. Their application to the testing of microelectronic circuits and components is described by examples taken from current technical literature, and by figures and photographs which illustrate the results that can be obtained with these instruments. A tabulation containing a partial list of commercially available microprobe analyzers and scanning electron microscopes together with their specifications and a bibliography of books, periodicals, and patents on electron probe instruments and related topics are included. (Author)