Thin-Film Dielectrics for Microelectronics: A Bibliography Compilation

摘要

The report was in response to a request for information on various thin-film dielectric materials used for making capacitive elements in microelectronics circuitry. Included are sections on the following: Thin film capacitors (general); Silicon monoxide film capacitors; Silicon dioxide film capacitors; Silicon nitride film capacitors; Tantalum oxide and other tantalate film capacitors; Titanium oxide film capacitors; Aluminum oxide film capacitors; Hafnium oxide film capacitors; Barium titanate and other titanate film capacitors; Solium niobate and other niobate film capacitors; Miscellaneous materials film capacitors.