Improved Temperature Compensation for Integrated Piezoresistive Transducers

摘要

In this report, a new method of temperature compensation of piezoresistive transducers based on linearity of parameters is described. This new approach has resulted in a considerable simplification of the problem as compared to the original series solution. A theoretical analysis of the new method is presented and compared with the results obtained from an actual experimental transducer. Subsequently, a complete design example is given to illustrate the steps necessary in the fabrication of a temperature-compensated transducer. Since some of the components used in the fabrication process cannot be built exactly to specification, an error analysis was performed. It predicts the deviations which can be tolerated and gives the appropriate degree of compensation. (Author)