Certain Problems Arising in Electron-Beam-Controlled Microcircuit Manufacturing Processes

摘要

The report investigates some problems which occur in the control of electron ray technological processes used in the production of microcircuitry. A brief 'state-of-the-art' review is made, in which the limitations of manual control of microminiature production are cited, and the possibilities of applying automatic process control to three-dimensional microminiaturization are discussed. One problem is the localizing of heat at one component without excessive disturbance of the temperature equilibrium at adjacent components. The heat energy stream is given by a combination of equations. Other equations developed by the author are related to the number of impulses applied, material vaporization rates, heating and cooling rates, and other controllable parameters. The author discusses some of the basic features of a possible numberical control unit which could be used with existing production machinery. (Author)