Micro-Step Motor

摘要

A simple reversible linear motor which steps along a precision track is described. Step size can be varied within the range 0.1 - 5.0 um and final motor position can be adjusted to 0.01 um. More complex versions of the motor and control circuits are also described. The motor uses a piezo-electric tube as the driving element which operates in conjunction with electromagnetic clamps to generate progressive movement. (Author)