Investigation of Plastic Effects on Semiconductor Reliability

摘要

The objective of the program was to study the effects produced when ions purposely were introduced into plastics and used on transistors. A materials survey resulted in the selection of several candidate high purity epoxy resins and semiconductor grade silicone coatings. These plastics were then screened using mechanical, physical, and chemical tests. One epoxy and one silicone were selected for further functional testing as semiconductor coatings. A method was developed for doping the two selected resins with ions by dispersing therein metal salts of organic acids or organo-metallic compounds. Dopants were organic salts of sodium, magnesium, zinc, or an organo-metallic compound containing chloride ions. The doped plastics were then applied and cured over test NPN transistors. The effects of each ion on the transistor parameters were ascertained after subjecting the devices to elevated temperature-reverse bias and high humidity reverse bias stresses. (Author)