Measurement of High Resistivity Semiconductors using the van der Pauw Method.

摘要

Apparatus is described that permits measurement of the electrical transport properties of semiconductors with resistance values over 10 to the 12th power ohms. The system utilizes a guarded approach to the van der Pauw method which simplifies sample geometry and contacting and permits evaluation of thin layers. The equipment is easy to operate, reliable, and constructed of readily available commercially purchased components. (Author)