Materials and Interface Factors Limiting LSI (Large Scale Integrated Circuits) Performance and Reliability

摘要

Material, chemical, physical, metallurgical and electrical effects in large scale integreated circuits (LSI) and other semiconductor devices are surveyed. Material transport phenomena, thermochemical and electrochemical effects, properties of metallization systems for semiconductor devices and semiconductor surface effects as they affect device performance and reliability are discussed. Eighty-nine references are provided. (Author)