The Development of a Probe-Type Thin Film Microthermocouple for Biomedical Use

摘要

Thin-film probe type thermocouples of micron dimensions can be produced by vapor deposition on quartz substrates. Processes for fabrication are described. The problem of low seebeck coefficient is solved by use of special annealing techniques and choice of element materials. Insulating films for element separation, electrical isolation and environmental protection are discussed. Response time of the microthermocouples is experimentally determined and compared with a theoretical model. Applications of the microthermocouple are discussed with respect to bio-medical usage. (Author)