Effect of Thermal Boundary Layer on RF Measurement of Plasma Parameters,

摘要

A fundamental limitation in microwave measurement of plasma parameters is established:It is shown that it is not possible to determine experimentally such plasma parameters as electron temperature,electron density,or collision frequency by means of a microwave system operating at a frequency well below the plasma frequency because the plasma boundary layer exerts a prominent effect on the measurements. A numerical example is given,using published results for argon. (Author)