Microwave Acoustic Surface Wave Delay Lines.

摘要

The final report contains a description of the electron beam microfabrication,transducer and matching circuit design,and packaging and testing (in certain cases) of 24acoustic surface wave devices,including delay lines,filters and test structures. Electrode widths were varies from 0.45to 3.0micrometers;electrodes per transducer ranged from 7to 274;transducers per crystal went as high as 6;and the substrates included lithium niobate,lithium tantalate,bismuth germanium oxide and quartz. A major portion of this program was the design,fabrication and evaluation of a particular bandpass filter. A set of conclusions are presented with general applicability. (Author)