Auger Analysis of Three Enhanced Multilayer Dielectric Mirror Designs.

摘要

Three multilayer dielectric enhanced laser mirror designs have been analyzed using Auger Spectroscopy. Particular care was taken to characterize all layers and interfaces for contamination and composition. The designs characterized were found to be ZnSe/ThF4 multilayers of four and five pair stacks. Principal contaminants were identified as oxygen and for the case of ZnSe layers, sulfur. (Author)