Fabrication of Low-Loss Optical Waveguides by Post Deposition Microstructure Modification.

摘要

This report summarizes contract progress of investigations into the effects of heat treatment on linear optical waveguide structures made of ferroelectric materials. It is hypothesized that low-loss polycrystalline waveguides may be produced by orienting grain boundaries perpendicular to the waveguide axis by thermo treatment. Using the Hatzakis lift-off technique with electron resist to obtain linear waveguides, lithium tantalate films on Corning 7059 glass slides have been examined. Presently produced lithium tantalate films are lithium deficient. Techniques for improving the stochiometry are being investigated. (Author)